Fabrication of Gold Split-ring Resonator Arrays by Surface-assisted Ultraviolet Nanoimprint Lithography Using Hydroxy-terminated Alkanethiol Monolayers

• Uehara Takuya

  IMRAM, Tohoku University

• Tomioka Tatsuya

  IMRAM, Tohoku University

• Kubo Shoichi

  IMRAM, Tohoku University

• Hoga Morihisa

  Research and Development Center, Dai Nippon Printing Co., Ltd.

• Nakagawa Masaru

  IMRAM, Tohoku University

抄録

Dewetting behaviors of sub-50-nm-thick ultraviolet-curable resin films comprising hydroxy-containing (meth)acrylate monomers on modified Au-plated substrates were investigated by fluorescence microscopy. Hydroxy-terminated alkanethiol-adsorbed monolayers on Au surfaces suppressed dewetting of the thin spin-coated films and allowed the fabrication of 50-nm-line-width Au split-ring resonator (SRR) arrays by ultraviolet nanoimprint lithography.

収録刊行物

• Chemistry Letters

  Chemistry Letters 42 (12), 1475-1477, 2013

  公益社団法人 日本化学会

キーワード

• General Chemistry

詳細情報

• CRID: 1390282679565063296
• NII論文ID: 130004867829
• DOI: 10.1246/cl.130720
• COI: 1:CAS:528:DC%2BC2cXntVOisQ%3D%3D
• ISSN: 13480715
• ISSN: 03667022
• Web Site: https://academic.oup.com/chemlett/article-pdf/42/12/1475/55637873/cl.130720.pdf
• 本文言語コード: en
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