Fine Patterning of Silver Metal by Electron Beam Irradiation onto Room-temperature Ionic Liquid

• Hiro Minamimoto

  Department of Applied Chemistry, Graduate School of Engineering, Osaka University

• Haruyasu Irie

  Department of Applied Chemistry, Graduate School of Engineering, Osaka University

• Taro Uematsu

  Department of Applied Chemistry, Graduate School of Engineering, Osaka University

• Tetsuya Tsuda

  Department of Applied Chemistry, Graduate School of Engineering, Osaka University

• Akihito Imanishi

  Department of Chemistry, Graduate School of Engineering Science, Osaka University

• Shu Seki

  Department of Applied Chemistry, Graduate School of Engineering, Osaka University

• Susumu Kuwabata

  Department of Applied Chemistry, Graduate School of Engineering, Osaka University

Abstract

A new silver micropatterning method has been developed by electron beam irradiation to room-temperature ionic liquid containing silver salts. This is the first achievement that uses liquid media to obtain metal deposits by electron beam lithography. Silver deposits were obtained as designed with high resolution and purity compared to the existing direct writing method.

Journal

• Chemistry Letters

  Chemistry Letters 44 (3), 312-314, 2014-12-12

  Oxford University Press (OUP)

Keywords

• General Chemistry

Details

• CRID: 1360565169059047296
• NII Article ID: 130004868383
• DOI: 10.1246/cl.141037
• ISSN: 13480715
• ISSN: 03667022
• Web Site: https://academic.oup.com/chemlett/article-pdf/44/3/312/55643682/cl.141037.pdf
• Data Source:
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  • CiNii Articles
  • KAKEN