Carbon Nanotube Electron Source for Field Emission Scanning Electron Microscopy

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  • Nakahara Hitoshi
    Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Japan
  • Ichikawa Shunsuke
    Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Japan
  • Ochiai Tomoya
    Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Japan
  • Kusano Yoshikazu
    Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Japan
  • Saito Yahachi
    Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Japan

抄録

A carbon nanotube (CNT) is one of the promising candidates for next generation field emission materials. We have been studied emission properties of CNTs and reported that even a thick (φ∼20 nm) multi-walled nanotube (MWNT) had a small emission area of about 5×10-14 cm2, which resulted in brightness enhancement by 1-2 orders as compared with conventional tungsten field emission electron source. In this study, a single MWNT emitter is mounted on a commercially available field emission scanning electron microscope (FE-SEM). Focused ion beam nano-machinning and nano-manipulation methods are used to prepare MWNT emitters, and practicalities of these emitters for FE-SEM use (beam alignment, beam stability, life time, image quality and resolution) are investigated. As a result, it is proved that the MWNT emitter can be used as a replacement of a single crystalline tungsten emitter without any modification of an existing FE electron gun and its control system. [DOI: 10.1380/ejssnt.2011.400]

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