Stress state analysis of stress engineered BaTiO₃ thin film by LaNiO₃ bottom electrode

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  • MURAKOSHI Kohei
    Department of Materials Science and Chemical Engineering, Shizuoka University
  • FUKAMACHI Kohei
    Department of Materials Science and Chemical Engineering, Shizuoka University
  • SAKAMOTO Naonori
    Department of Materials Science and Chemical Engineering, Shizuoka University
  • OHNO Tomoya
    Department of Material Science, Kitami Institute of Technology
  • KIGUCHI Takanori
    Institute for Materials Research, Tohoku University
  • MATSUDA Takeshi
    Department of Material Science, Kitami Institute of Technology
  • KONNO Toyohiko
    Institute for Materials Research, Tohoku University
  • WAKIYA Naoki
    Department of Materials Science and Chemical Engineering, Shizuoka University
  • SUZUKI Hisao
    Graduate School of Materials Science and Technology, Shizuoka University

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  • Stress state analysis of stress engineered BaTiO<sub>3</sub> thin film by LaNiO<sub>3</sub> bottom electrode

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Ferroelectric materials with excellent performance without containing lead has been desired for saving human body from a harmful element, lead. The authors have reported BaTiO3 (BTO) thin films with enhanced ferroelectricity by stress engineering by thermal stress assisted by LaNiO3 (LNO) bottom electrodes. In the present study, we investigate the local stress state of the BTO and LNO films using TEM techniques. TEM observation reveals that the LNO film is porous structure whereas the BTO film is dense. Electron diffraction and dark field images of the films also reveal that the BTO and LNO films oriented along [001] and [100] directions perpendicular to the film plane, respectively. Another effect on the stressed BTO films, increased Curie temperature owing to the stabilized tetragonal phase, is also reported.

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