Fabrication of Zinc Oxide Nanostructures by Mist Chemical Vapor Deposition

DOI Web Site 被引用文献3件 参考文献22件
  • Li Xin
    Institute for Nanotechnology, Kochi University of Technology Electronic and Photonic Systems Engineering Department, Kochi University of Technology
  • Li Chaoyang
    Institute for Nanotechnology, Kochi University of Technology
  • Kawaharamura Toshiyuki
    Institute for Nanotechnology, Kochi University of Technology
  • Wang Dapeng
    Institute for Nanotechnology, Kochi University of Technology
  • Nitta Noriko
    Institute for Nanotechnology, Kochi University of Technology
  • Furuta Mamoru
    Environmental Engineering Department, Kochi University of Technology
  • Furuta Hiroshi
    Electronic and Photonic Systems Engineering Department, Kochi University of Technology
  • Hatta Akimitsu
    Institute for Nanotechnology, Kochi University of Technology Electronic and Photonic Systems Engineering Department, Kochi University of Technology

抄録

ZnO nanostructures with well-controlled growth on silicon substrate were fabricated in a reducing gas ambient following by a novel mist chemical vapor deposition (Mist CVD) treatment. The effects of Mist CVD post-treatment time on the crystal growth, structural properties were investigated. It was found that the morphology of ZnO nanostructures was significantly modified and regrown during Mist CVD post-treatment process. The crystallinity of ZnO nanostructures was remarkably changed after Mist CVD post-treatment due to the huge regrowth of nanostructures. The mechanism of the nanostructures growth in Mist CVD was investigated in detail.

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