Study on high precise 3–dimensional coordinate measurement with laser trapping probe

• Michihata Masaki

  Osaka university

• Takaya Yasuhiro

  Osaka university

• Miyoshi Takashi

  Osaka university

• Hayashi Terutake

  Osaka university

Bibliographic Information

Other Title

• レーザートラッピングプローブを用いた高精度3次元座標計測に関する研究

Abstract

Manufactures have being strongly desiring dimensional measurement instruments that have an ability to measure complex shaped microscopic objects. In this paper, a prototype of Nano–CMM, which equipped the laser trapping probe as a high sensitive position detection probe and 3–axes–stage with high accurate linear scales as a positioning stage, was introduced. This study aims to finally achieve the dimensional measurement of micro–devices such as micro–parts or micro–lens dies, for which measuring range of over 10mm and measuring accuracy of 10nm should be accomplished.

Journal

• Proceedings of JSPE Semestrial Meeting

  Proceedings of JSPE Semestrial Meeting 2006S (0), 1053-1054, 2006

  The Japan Society for Precision Engineering

Keywords

• Laser trap
• Nano–CMM

Details

• CRID: 1390001205651245312
• NII Article ID: 130005027106
• DOI: 10.11522/pscjspe.2006s.0.1053.0
• Data Source:
  • JaLC
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed