A Study of Fabrication of Micro/nano-mechanical Structure Using Transfer-print

• MURAKAMI Hiromichi

  首都大学東京大学院

• YOSHINO Kensaku

  首都大学東京大学院

• KANEKO Arata

  首都大学東京大学院

Bibliographic Information

Other Title

• トランスファプリントを応用した微小機械要素作製に関する研究

Abstract

This present study proposes a process to fabricate micro/nano-mechanical structure for MEMS application using transfer-print. Au thin-film is transferred from a h-PDMS stamp to a micro-structured SU-8 substrate, which have an array of 50-μm-width micro-ridges and micro-grooves. The transferred Au thin-film, of which the thickness is less than 100nm, is formed into the micro-beam across the micro-ridges of substrate. The deposition process of thin-film and the surface morphology of h-PDMS stamp are also investigated to clarify appropriate surface properties for transfer print. Vapor-deposited Au thin-film can be easily released from the hydrophobic stamp. Multi-layered thin-films of Au/Ni/Cu and Au/Al/Cu are prepared on the stamp and also processed on the micro-structured substrate by transfer-print. The transferred multi-layer thin-films are also formed into an array of micro-beams with 100nm thickness. Their production yield and from accuracy can be improved due to modified surface and mechanical strength of multi-layered thin-film as compared with that of monolayer thin-film.

Journal

• Journal of the Japan Society for Precision Engineering

  Journal of the Japan Society for Precision Engineering 81 (4), 344-348, 2015

  The Japan Society for Precision Engineering

Keywords

• transfer-print
• micro-beam
• thin-film

Details

• CRID: 1390282679805965824
• NII Article ID: 130005060676
• DOI: 10.2493/jjspe.81.344
• ISSN: 1882675X
• ISSN: 09120289
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed