An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors

• Yamane Daisuke

  Tokyo Institute of Technology

• Konishi Toshifumi

  NTT Advanced Technology Corporation

• Matsushima Takaaki

  NTT Advanced Technology Corporation

• Kamei Shota

  Tokyo Institute of Technology

• Masu Kazuya

  Tokyo Institute of Technology

• Machida Katsuyuki

  Tokyo Institute of Technology NTT Advanced Technology Corporation

Bibliographic Information

Other Title

• 高感度静電容量型センサにおけるBrownian Noise評価手法

Abstract

This paper reports a novel method of evaluating the actual Bn (Brownian Noise) in capacitive sensors for high sensitivity. By analyzing the frequency response of the electrical impedance, the proposed method provides an advantage of evaluating the Bn associated with the mechanical characteristics of capacitive sensors even when the sensors are packaged. We employed the method to measure the quality factors of the MEMS capacitive sensors, and evaluated the value of the Bn and the damping coefficients. The experimental results show a good agreement with the conventionally-known physical parameters.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 135 (4), 142-143, 2015

  The Institute of Electrical Engineers of Japan

Keywords

• capacitive sensor
• Brownian Noise
• MEMS accelerometer
• Q factor
• damping coefficient

Details

• CRID: 1390282679438422144
• NII Article ID: 130005061970
• DOI: 10.1541/ieejsmas.135.142
• ISSN: 13475525
• ISSN: 13418939
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/135/4/135_142/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed