Evaluation of ZnO-MgO Mixed Thin Films Grown by Metal-Organic Decomposition

• Nishimoto Naoki

  Shimane Institute for Industrial Technology

• Yoshino Katsumi

  Shimane Institute for Industrial Technology

• Fujihara Junko

  Department of Legal Medicine, Faculty of Medicine, Shimane University

• Kitahara Kuninori

  Interdisciplinary Faculty of Science and Engineering, Shimane University

抄録

The influence of ZnO-MgO mixed metal-organic decomposition (MOD) coating materials have been investigated based on crystal growth and film properties of ZnO-MgO mixed thin films. These mixed thin films were grown on quartz substrates by dip coating and then sintered at 550°C. The film properties were evaluated using an atomic force microscope and a UV-VIS-NIR spectrophotometer, and by performing X-ray diffraction measurements. The growth mechanism is changed by MgO in ZnO-MgO mixed MOD coating materials. Mg segregated to the surface side in the ZnO-MgO mixed thin film, and some of the segregated Mg formed ZnMgO. In addition, the grain size of ZnO-MgO mixed thin films increased with an increase in the amount of MgO additive. Therefore, it can be concluded that grain boundary segregation of Mg enhances crystal growth. This enhancement of crystal growth by the intentional addition of an impurity can be applied to improving the characteristics of other semiconductor materials. [DOI: 10.1380/ejssnt.2015.185]

収録刊行物

• e-Journal of Surface Science and Nanotechnology

  e-Journal of Surface Science and Nanotechnology 13 (0), 185-189, 2015

  公益社団法人 日本表面真空学会

キーワード

• Atomic force microscopy
• Zinc oxide
• Polycrystalline surfaces
• Semiconductor-semiconductor thin film structures

詳細情報

• CRID: 1390001205186432896
• NII論文ID: 130005065388
• DOI: 10.1380/ejssnt.2015.185
• ISSN: 13480391
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可