Evaluation of Accuracy of Charge Pumping Current in Time Domain

• WATANABE Tokinobu

  University of Toyama

• HORI Masahiro

  University of Toyama

• SARUWATARI Taiki

  University of Toyama

• TSUCHIYA Toshiaki

  Shimane University

• ONO Yukinori

  University of Toyama

抄録

Accuracy of a method for analyzing the interface defect properties; time-domain charge pumping method, is evaluated. The method monitors the charge pumping (CP) current in time domain, and thus we expect that it gives us a noble way to investigate the interface state properties. In this study, for the purpose of evaluating the accuracy of the method, the interface state density extracted from the time-domain data is compared with that measured using the conventional CP method. The results show that they are equal to each other for all measured devices with various defect densities, demonstrating that the time-domain CP method is sufficiently accurate for the defect density evaluation.

収録刊行物

• IEICE Transactions on Electronics

  IEICE Transactions on Electronics E98.C (5), 390-394, 2015

  一般社団法人 電子情報通信学会

キーワード

• Charge pumping
• Time domain measurement
• Interface state density
• Electron capture
• Recombination

詳細情報

• CRID: 1390282679354196352
• NII論文ID: 130005067742
• DOI: 10.1587/transele.e98.c.390
• ISSN: 17451353
• ISSN: 09168524
• Web Site: https://www.jstage.jst.go.jp/article/transele/E98.C/5/E98.C_390/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可