P(VDF/TrFE)薄膜を用いたMEMS超音波センサの開発  [in Japanese] Development of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films  [in Japanese]

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Author(s)

Abstract

MEMS ultrasonic sensor was fabricated using the poly(vinylidene fluoride-trifluoroethylene)[P(VDF/TrFE)] copolymer thin films having multilayer diaphragm structures. It was shown that the P(VDF/TrFE) thin film on MEMS ultrasonic sensor exhibit a remanent polarization <i>P</i><sub>r</sub> of 72 mC/m<sup>2</sup> and a coercive field <i>E</i><sub>c</sub> of 59 MV/m. The resonant frequency, Q-value and sensitivity of the MEMS ultrasonic sensors are estimated to be on the order of 178 kHz, 24 and 45 µV/Pa, respectively. The P(VDF/TrFE) thin film was shown to be useful for piezoelectric material of MEMS ultrasonic sensor.

Journal

  • IEEJ Transactions on Sensors and Micromachines

    IEEJ Transactions on Sensors and Micromachines 135(5), 145-151, 2015

    The Institute of Electrical Engineers of Japan

Codes

  • NII Article ID (NAID)
    130005067828
  • NII NACSIS-CAT ID (NCID)
    AN1052634X
  • Text Lang
    JPN
  • ISSN
    1341-8939
  • NDL Article ID
    026421288
  • NDL Call No.
    Z16-B380
  • Data Source
    NDL  J-STAGE 
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