Development of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films

• Tanaka Tsunehisa

  Technology Research Institute of Osaka Prefecture

• Murakami Shuichi

  Technology Research Institute of Osaka Prefecture

• Uno Mayumi

  Technology Research Institute of Osaka Prefecture

• Yamashita Kaoru

  Graduate School of Science and Technology, Kyoto Institute of Technology

Bibliographic Information

Other Title

• P(VDF/TrFE)薄膜を用いたMEMS超音波センサの開発
• P(VDF/TrFE)ハクマク オ モチイタ MEMS チョウオンパ センサ ノ カイハツ

Abstract

MEMS ultrasonic sensor was fabricated using the poly(vinylidene fluoride-trifluoroethylene)[P(VDF/TrFE)] copolymer thin films having multilayer diaphragm structures. It was shown that the P(VDF/TrFE) thin film on MEMS ultrasonic sensor exhibit a remanent polarization P_r of 72 mC/m² and a coercive field E_c of 59 MV/m. The resonant frequency, Q-value and sensitivity of the MEMS ultrasonic sensors are estimated to be on the order of 178 kHz, 24 and 45 µV/Pa, respectively. The P(VDF/TrFE) thin film was shown to be useful for piezoelectric material of MEMS ultrasonic sensor.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 135 (5), 145-151, 2015

  The Institute of Electrical Engineers of Japan

Keywords

• Ultrasonic Sensor
• MEMS
• P(VDF/TrFE)
• Diagram
• Polymer
• Ferroelectric

Details

• CRID: 1390001204462476032
• NII Article ID: 130005067828
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.135.145
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 026421288
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026421288
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/135/5/135_145/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed