シリコン太陽電池作製実験教材の開発及び工学実験への導入

• 辻 琢人

  鈴鹿工業高等専門学校

• 長岡 史郎

  香川高等専門学校

• 若原 昭浩

  豊橋技術科学大学

書誌事項

タイトル別名

• Development of an Educational Resource of Si Solar Cell Fabrication and Introduction to an Engineering Experiment

抄録

A lot of manufacturing equipment and processes must be generally required for fabrication of semiconductor devices, and it is difficult for many colleges of technology to make the semiconductor devices in engineering experiments which are regarded as important at colleges of technology. It is expected that students studying at colleges of technology effectively acquire expertise in semiconductor engineering through the practical experience of experiments. Therefore, we developed an educational resource of silicon solar cell fabrication. The fabrication process of silicon solar cell is simplified by using PSG thin film as a thermal diffusion source and also a metal mask to form aluminum electrodes. Then, this educational resource of Si solar cell fabrication is introduced and utilized in an Engineering Experiment.

収録刊行物

• 工学教育

  工学教育 63 (4), 4_33-4_36, 2015

  公益社団法人 日本工学教育協会

キーワード

• 工学教育
• 実践教育
• 半導体素子作製
• シリコン太陽電池

詳細情報

• CRID: 1390001204493182080
• NII論文ID: 130005090528
• DOI: 10.4307/jsee.63.4_33
• ISSN: 18810764
• ISSN: 13412167
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可