テラヘルツ波を用いた誘電体の表面粗さ測定

• 福地 哲生

  （一財）電力中央研究所 電力技術研究所

• 布施 則一

  （一財）電力中央研究所 電力技術研究所

• 水野 麻弥

  （独）情報通信研究機構 電磁波計測研究所

• 福永 香

  （独）情報通信研究機構 電磁波計測研究所

書誌事項

タイトル別名

• Measurement of Surface Roughness of Dielectric Materials using Terahertz Waves
• テラヘルツハ オ モチイタ ユウデンタイ ノ ヒョウメン アラサ ソクテイ

抄録

The surface roughness of sandpaper specimens with alumina abrasive was measured based on the effective reflectivity of terahertz waves. Measurement results based on the frequency dependence of the effective reflectivity were in agreement with measurement results using a contact surface roughness gauge to within 10% for surface roughness 10-35 µm. In addition, the frequency-averaged effective reflectivity was calculated with the surface roughness as a parameter. This provided a calibration curve to convert the measured frequency-averaged effective reflectivity to surface roughness. Measurement results based on the frequency-averaged effective reflectivity were in agreement with measurement results using a contact surface roughness gauge for surface roughness below 25 µm. The effect of the paint layer coating the abrasive did not result in significant error. The results showed that terahertz waves can be used for noncontact measurement of the surface roughness of dielectric surfaces.

収録刊行物

• 電気学会論文誌．　Ａ

  電気学会論文誌．　Ａ 135 (8), 450-455, 2015

  一般社団法人 電気学会

キーワード

• テラヘルツ波
• 誘電体
• 表面粗さ
• 反射率
• 周波数特性
• アルミナ

詳細情報

• CRID: 1390282679575268480
• NII論文ID: 130005090590
• NII書誌ID: AN10136312
• DOI: 10.1541/ieejfms.135.450
• ISSN: 13475533
• ISSN: 03854205
• NDL書誌ID: 026672248
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026672248
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms/135/8/135_450/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可