Strain Field Around Lomer Sessile Dislocations in Silicon Measured using Geometric Phase Analysis
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- Adhika Damar Rastri
- Department of Materials Science and Engineering, Kyushu University
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- Tanaka Masaki
- Department of Materials Science and Engineering, Kyushu University
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- Yamamoto Tomokazu
- Department of Applied Quantum Physics and Nuclear Engineering, Kyushu University
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- Higashida Kenji
- Department of Materials Science and Engineering, Kyushu University
Abstract
Strain fields around dislocation pairs were measured using geometrical phase analysis of high-resolution TEM images. Single crystalline (011) silicon wafers were employed. The wafers were deformed using three-point bending at 1123K in order to introduce dislocations. The observed dislocations were found to be Lomer sessile dislocations. The strain fields around the dislocations experimentally measured were in good agreement with those calculated from the elastic theory. Experimental results showed that the strain field of two dislocations can be regarded as a single dislocation when their distance is less than 6b.
Journal
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- Transactions of the Materials Research Society of Japan
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Transactions of the Materials Research Society of Japan 40 (3), 227-233, 2015
The Materials Research Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282680488572928
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- NII Article ID
- 130005096531
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- ISSN
- 21881650
- 13823469
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- Text Lang
- en
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed