Three-dimensional Dielectrophoresis with Dielectric Pillar Arrays Fabricated by Soft Lithography

• Watabe Ryo

  Dept. of Electrical Engineering, Shibaura Institute of Technology

• Uchida Satoshi

  Graduate School of Science and Engineering, Tokyo Metropolitan University

• Nishikawa Hiroyuki

  Dept. of Electrical Engineering, Shibaura Institute of Technology

Bibliographic Information

Other Title

• ソフトリソグラフィによる誘電体ピラーを利用した3次元誘電泳動効果
• ソフトリソグラフィ ニ ヨル ユウデンタイ ピラー オ リヨウ シタ 3ジゲン ユウデン エイドウ コウカ

Abstract

We studied 3D dielectrophoretic (DEP) effects induced by dielectric pillar arrays fabricated by soft lithography. Polydimethylsiloxane (PDMS) was casted onto a PMMA mold with arrays of high-aspect-ratio holes micromachined by proton beam writing (PBW), which is a novel direct-write lithographic technique using a scanning proton beam. Arrays of PDMS pillars with diameter of ∼3 µm and a height of ∼15 µm, were fabricated using the soft lithography. The 3D-DEP effect was demonstrated using the PDMS pillar arrays incorporated into a channel on a glass substrate by measuring a trapping capability of E. coli. Coupled use of the soft lithgraphy with the PBW enables us to fabricate low-cost 3D-DEP devices with improved throughput.

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 135 (9), 548-552, 2015

  The Institute of Electrical Engineers of Japan

Keywords

• proton beam writing
• dielectrophoresis
• soft lithography

Details

• CRID: 1390282679575807872
• NII Article ID: 130005096908
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms.135.548
• ISSN: 13475533
• ISSN: 03854205
• NDL BIB ID: 026749317
• Web Site: http://id.ndl.go.jp/bib/026749317
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026749317
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms/135/9/135_548/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed