Development of magnetically driven micro valve using SU-8/Fe composite

• SUZUKI Junya

  香川大学

• TERAO Kyohei

  香川大学

• TAKAO Hidekuni

  香川大学

• SHIMOKAWA Fusao

  香川大学

• OOHIRA Fumikazu

  香川大学

• SUZUKI Takaaki

  群馬大学

Bibliographic Information

Other Title

• SU-8/Feコンポジットを用いた磁気駆動型マイクロバルブの開発
• SU-8/Fe コンポジット オ モチイタ ジキ クドウガタ マイクロバルブ ノ カイハツ

Abstract

In this study, we propose a magnetically driven micro valve made of magnetic composite with thick negative photoresist SU-8 and magnetic particles. It is able to fabricate a magnetically driven element using simple processing method based on micromachining technology by magnetic composite. To evaluate performance of the proposed microvalve, driving test under the external magnetic field was carried out. A prototype of the microvalve has the flow rate reduction rate of about 60%, and pressure resistance of 9 kPa.

Journal

• Journal of the Japan Society of Applied Electromagnetics and Mechanics

  Journal of the Japan Society of Applied Electromagnetics and Mechanics 23 (2), 407-413, 2015

  The Japan Society of Applied Electromagnetics and Mechanics

Keywords

• SU-8/Fe composite
• micro valve
• magnetic drive

Details

• CRID: 1390001205504460416
• NII Article ID: 130005098688
• NII Book ID: AN10457520
• DOI: 10.14243/jsaem.23.407
• ISSN: 21879257
• ISSN: 09194452
• NDL BIB ID: 026626649
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I026626649
• Web Site: https://www.jstage.jst.go.jp/article/jsaem/23/2/23_407/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed