回転 CVD 法によるニッケル触媒の開発

書誌事項

タイトル別名
  • Development of Nickel Catalyst by Rotary Chemical Vapor Deposition
  • カイテン CVDホウ ニ ヨル ニッケル ショクバイ ノ カイハツ

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抄録

Chemical vapor deposition (CVD) is generally employed to prepare thin films, whereas CVD can also prepare nano-particles by homogeneous nucleation in a gas phase or on support powder as catalyst. Although fluidized-bed CVD (FBCVD) has often been used to prepare particle/film on fluidized powder, the powder size of FBCVD is rather limited to several 10 to 100μm in diameter to fluidize powder in a gas phase. We have developed Rotary CVD (RCVD), which has no limitation of powder size to deposit. Ni nano-particles a few nanometer in diameter were prepared on Al2O3, mesoporous silica and Zeorite powders by RCVD using Nickelocene precursor. Ni nano-particles were deposited inside mesoporous silica showing more than 6 times higher H2 production by steam methane reforming reaction than that of conventional Ni catalyst.

収録刊行物

  • 粉体工学会誌

    粉体工学会誌 53 (2), 90-97, 2016

    一般社団法人 粉体工学会

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