Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation

• Ohnishi Wataru

  The University of Tokyo

• Fujimoto Hiroshi

  The University of Tokyo

• Sakata Koichi

  Nikon Corporation

• Suzuki Kazuhiro

  Nikon Corporation

• Saiki Kazuaki

  Nikon Corporation

Abstract

High-precision stages are widely used in the semiconductor and flat panel industries. Because six degrees of freedom have to be controlled in these stages, coupling forces can degrade their control performance and stability. This paper proposes a decoupling control method from the scanning motion x to the pithing motion θ_y using multiple actuators considering the misalignment of the actuation point, the center of gravity (CoG), and the center of rotation (CoR). The method proposed in this paper consists of three steps: 1) a detailed modeling of the the scanning motion x and the pitching motion θ_y, 2) a changeable actuation point stage, and 3) an integrated design of mechanism and control. The validity of the proposed method is demonstrated by experiments.

Journal

• IEEJ Journal of Industry Applications

  IEEJ Journal of Industry Applications 5 (2), 141-147, 2016

  The Institute of Electrical Engineers of Japan

Keywords

• multiple actuator
• decoupling control
• integrated design of mechanism and control
• high-precision stage

Details

• CRID: 1390001205415005824
• NII Article ID: 130005133141
• DOI: 10.1541/ieejjia.5.141
• ISSN: 21871108
• ISSN: 21871094
• ISSN: http://id.crossref.org/issn/21871094
• NDL BIB ID: 027147993
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I027147993
• Web Site: https://www.jstage.jst.go.jp/article/ieejjia/5/2/5_141/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed