レーザーCVDによる高配向チタン酸カルシウム膜の高速成長

• 且井 宏和

  東北大学金属材料研究所

• 熊谷 友希

  東北大学金属材料研究所

• 後藤 孝

  東北大学金属材料研究所

書誌事項

タイトル別名

• High-Speed Deposition of Highly-Oriented Calcium Titanate Film by Laser CVD
• レーザー CVD ニ ヨル コウハイコウ チタンサン カルシウムマク ノ コウソク セイチョウ

抄録

Highly (011)- and (101)-oriented calcium titanate (CaTiO₃) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO₃ films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO₃ films changed from (011) to (101). The highly (101)-oriented CaTiO₃ films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h⁻¹, which was 10 times as great as that by conventional thermal CVD.

収録刊行物

• 粉体および粉末冶金

  粉体および粉末冶金 63 (3), 123-127, 2015

  一般社団法人 粉体粉末冶金協会

キーワード

• laser chemical vapor deposition
• oriented texture
• high-speed deposition
• biomaterial

詳細情報

• CRID: 1390001206309834112
• NII論文ID: 130005143585
• NII書誌ID: AN00222724
• DOI: 10.2497/jjspm.63.123
• ISSN: 18809014
• ISSN: 05328799
• NDL書誌ID: 027207291
• Web Site: http://id.ndl.go.jp/bib/027207291
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I027207291
• Web Site: https://www.jstage.jst.go.jp/article/jjspm/63/3/63_123/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可