Automatic Background Estimation and Quantitative Analysis for XPS Spectrum by Active Shirley Method
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- Matsumoto Ryo
- National Institute of Technology, Yonago College University of Tsukuba National Institute for Materials Science
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- Nishizawa Yugo
- National Institute of Technology, Yonago College
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- Kataoka Noriyuki
- National Institute of Technology, Yonago College
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- Tanaka Hiromi
- National Institute of Technology, Yonago College
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- Yoshikawa Hideki
- National Institute for Materials Science
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- Tanuma Shigeo
- National Institute for Materials Science
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- Yoshihara Kazuhiro
- Scienta Omicron
Bibliographic Information
- Other Title
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- 動的Shirley法によるXPSスペクトルのバックグラウンド自動推定と定量分析
- ドウテキ Shirleyホウ ニ ヨル XPS スペクトル ノ バックグラウンド ジドウ スイテイ ト テイリョウ ブンセキ
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Abstract
The arbitrary estimation of the shape of background adversely affects the results of quantitative analysis because of over- or under-estimation of peak area. Especially, the resultant background by the iterative Shirley method that is widely used is strongly dependent on the operator's choice of the starting and ending points on the XPS spectrum. To decrease this undesirable dependency, we focused on the active Shirley method, which automatically adjusts the background intensities at the starting and ending points during the peak fitting process. We installed this method into the COMPRO software and performed the peak fitting of Cu 2p spectrum in Bi-based superconductor and the thickness determination for SiO2 / Si thin film on the GUI of COMPRO. The shape of backgrounds and peak areas were stably obtained by using the active Shirley method with various ending points of background and peak shapes of Voigt functions.
Journal
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- Journal of Surface Analysis
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Journal of Surface Analysis 22 (3), 155-167, 2016
The Surface Analysis Society of Japan
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Details 詳細情報について
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- CRID
- 1390001204471238272
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- NII Article ID
- 130005154805
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- NII Book ID
- AA11448771
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- ISSN
- 13478400
- 13411756
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- NDL BIB ID
- 027214633
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed