Demolding in Ultraviolet Nanoimprinting Assisted by a Nanoscale Lubricating Fluid Layer of Condensed Alternative Chlorofluorocarbon

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  • Masaru Nakagawa
    Polymer·Hybrid Materials Research Center, Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577
  • Shu Kaneko
    Polymer·Hybrid Materials Research Center, Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577
  • Shunya Ito
    Polymer·Hybrid Materials Research Center, Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577

Abstract

<jats:title>Abstract</jats:title> <jats:p>We demonstrated that demolding in ultraviolet (UV) nanoimprinting was assisted by a nanoscale lubricating fluid layer of a liquefied 1,1,1,3,3-pentafluoropropane (PFP) gas. UV-curable Resin A composed of glycerol 1,3-diglycerolate diacrylate with low PFP absorption showed low surface roughness of 22-nm line-and-space imprint patterns with the smallest line edge roughness (LER) value of 3σ = 1.8 nm. As the molar ratio of 1,6-hexanediol diacrylate with large PFP absorption was increased in the UV-curable resin, the morphological characteristics worsened. Although thin cured films of Resin A possessed a large surface free energy of 57.6 mJ m−2, Resin A could be used for step-and-repeat UV nanoimprinting with bare and fluorinated silica molds. Quartz crystal microbalance measurements suggested that a PFP adsorption layer was formed at a film surface of uncured Resin A upon exposure to PFP gas and functioned as a nanoscale lubricating fluid layer during UV nanoimprinting.</jats:p>

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