水晶振動子を用いた液体分析用コンボセンサにおける形状最適化  [in Japanese] Shape Optimization of Combo Sensor using Quartz Crystal Resonator for Liquid Analysis  [in Japanese]

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Author(s)

Abstract

In this paper, we report the optimized combo sensor using quartz crystal resonator for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating a LFE (Lateral Field Excited) sensor with an ACR (Antiparallel Coupled Resonator) or two types of ACR sensor on a same substrate. We optimized the electrode diameter of resonator for measuring a glucose aqueous solution or NaCl aqueous solution. Moreover, we measured concentration of glucose aqueous solution and NaCl aqueous solution with optimized sensor. This sensor is expected to be used for product quality control in industrial plants.

Journal

  • IEEJ Transactions on Sensors and Micromachines

    IEEJ Transactions on Sensors and Micromachines 136(8), 343-347, 2016

    The Institute of Electrical Engineers of Japan

Codes

  • NII Article ID (NAID)
    130005254422
  • NII NACSIS-CAT ID (NCID)
    AN1052634X
  • Text Lang
    JPN
  • ISSN
    1341-8939
  • NDL Article ID
    027600215
  • NDL Call No.
    Z16-B380
  • Data Source
    NDL  J-STAGE 
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