Development of Nanoimprint Lithography Template Materials using Biomass

• Nakajima Shinya

  Toyama Prefectural University

• Takei Satoshi

  Toyama Prefectural University

• Zhou Ziqi

  Toyama Prefectural University

• Maki Hirotaka

  Toyama Prefectural University

• Sugahara Kigen

  Toyama Prefectural University

• Hanabata Makoto

  Toyama Prefectural University

• Matsumoto Yoko

  Litho Tech Japan Corporation

• Sekiguchi Atsushi

  Litho Tech Japan Corporation

抄録

A template using biomass materials in nanoimprint lithography has gas permeability that is expected to reduce defects from air trapping and template damage. The dependences of indentation elastic modulus, light transmission rate and oxygen gas permeability coefficient on baking temperature of the biomass template were evaluated. It was found that indentation elastic modulus increased but light transmission rate and oxygen gas permeability decreased with increasing the baking temperature. 5µm and 1µm line regularly-nanostructures of master template were successfully transferred to biomass template. The gas permeable biomass template having nanostructure is expected to extend to future research, such as templates for imprinting volatile materials and solvent including materials.

収録刊行物

• Journal of Photopolymer Science and Technology

  Journal of Photopolymer Science and Technology 29 (2), 189-193, 2016

  フォトポリマー学会

キーワード

• nanoimprint lithography
• biomass
• hydroxyl propyl cellulose
• defect reduction
• indentation elastic modulus
• gas permeability

詳細情報

• CRID: 1390001204325811072
• NII論文ID: 130005256594
• NII書誌ID: AA11576862
• DOI: 10.2494/photopolymer.29.189
• ISSN: 13496336
• ISSN: 09149244
• NDL書誌ID: 027467133
• Web Site: http://id.ndl.go.jp/bib/027467133
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I027467133
• Web Site: https://www.jstage.jst.go.jp/article/photopolymer/29/2/29_189/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可