a-C:H膜の内部構造と摩擦特性の相関

• 石川 功

  東京大学

• 崔 埈豪

  東京大学 工学系研究科 機械工学専攻

書誌事項

タイトル別名

• Study on the Friction Properties of a-C:H Films in a Microstructural Point of View
• a-C:Hマク ノ ナイブ コウゾウ ト マサツ トクセイ ノ ソウカン

抄録

Hydrogenated amorphous carbon (a-C:H) films have been applied in many mechanical components because of their prominent mechanical and tribological properties. Since these properties of a-C:H films are deeply correlated with their microstructure, it is important to understand the microstructure of a-C:H films and then discuss the friction properties of a-C:H films in a microstructural point of view, to clarify the friction mechanism. In this study, the microstructure of a-C:H films was analyzed by Raman spectroscopy, and the friction tests were conducted using pin-on-disc type tribotester in the air. It was found that the frictional properties of a-C:H films depend on their microstructure, i.e., polymer-like carbon (PLC), diamond-like carbon (DLC) and graphite-like carbon (GLC) structures. The PLC and GLC-structured a-C:H films show lower friction coefficients compared to that of the DLC-structured film. Two different trends are observed in the relationship between the hardness and the friction coefficient with respect to the microstructure of a-C:H films. The chemistry of the friction interface is dependent on the microstructure of a-C:H films, which affects to the friction coefficient.

収録刊行物

• トライボロジスト

  トライボロジスト 62 (2), 122-128, 2017

  一般社団法人 日本トライボロジー学会

キーワード

• <i>a-C:H film</i>
• <i>microstructure</i>
• <i>friction</i>
• <i>Raman spectroscopy</i>
• <i>plasma based ion implantation and deposition</i>

詳細情報

• CRID: 1390282680449699712
• NII論文ID: 130005331821
• NII書誌ID: AN10056166
• DOI: 10.18914/tribologist.16-00021
• ISSN: 21899967
• ISSN: 09151168
• NDL書誌ID: 027988062
• Web Site: http://id.ndl.go.jp/bib/027988062
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I027988062
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • CiNii Articles
  • KAKEN
  • Crossref
• 抄録ライセンスフラグ: 使用不可