Study on Metal Film Formation by Large-area Electron Beam Irradiation

• Shinonaga Togo

  Graduate School of Natural Science & Technology, Okayama University

• Takata Masashi

  Graduate School of Natural Science & Technology, Okayama University

• Okada Akira

  Graduate School of Natural Science & Technology, Okayama University

• Sano Sadao

  Machining Center Division, Sodick Co., Ltd,

抄録

Recently, many surfacing processes, such as coating have been widely applied to the industrial products in order to improve the surface functions. One of the practical surfacing processes is a sputter deposition, in which the sputtered target material is deposited on the substrate surface. This method can be used not only for metals but also for insulators and plastics materials as substrate surface. In this study, the possibility of sputter deposition by using a large-area electron beam was discussed. If the target material deposits on the substrate surface simultaneously with the surface melting and resolidification of substrate material by large-area EB, the adhesion between the deposited film and the substrate surface would be strong. Alloy tool steel SKD11 was used as a substrate material, and pure metal tube made of nickel or titanium were used as a target material. Then, the substrate surface after EB irradiation was analyzed and the surface characteristics were investigated.

収録刊行物

• International Journal of Electrical Machining

  International Journal of Electrical Machining 21 (0), 7-12, 2016

  一般社団法人 電気加工学会

キーワード

• Large-area electron beam
• Film formation
• Sputter deposition
• Pure metal

詳細情報

• CRID: 1390001205756471680
• NII論文ID: 130005395685
• NII書誌ID: AN10564586
• DOI: 10.2526/ijem.21.7
• ISSN: 21885117
• ISSN: 13417908
• NDL書誌ID: 027561503
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I027561503
• Web Site: https://www.jstage.jst.go.jp/article/ijem/21/0/21_7/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可