X線CT画像における逐次近似的手法を用いた撮像位置のずれ推定による画質改善手法  [in Japanese] Quality Improvement of X-ray CT Images by Estimation of the Mechanical Misalignment in a Projection Image Using an Iterative Method  [in Japanese]

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Author(s)

Abstract

<p>An X-ray computed tomography (CT) apparatus is required for the inspection of semiconductor packages to detect fine voids with high accuracy. However, obtaining high-quality CT images stably is difficult because of object misalignment. In this paper, we propose a method for improving the X-ray CT image quality by estimating the mechanical misalignment of each projection image. The estimation is conducted by using an iterative method based on the characteristic features obtained from the reconstructed image. In experiments, we verified the effectiveness of proposed method by using projection images with simulated misalignments added. The results indicated that the proposed method may be useful for improving the quality of CT imaging.</p>

Journal

  • IEEJ Transactions on Industry Applications

    IEEJ Transactions on Industry Applications 137(3), 213-219, 2017

    The Institute of Electrical Engineers of Japan

Codes

  • NII Article ID (NAID)
    130005398568
  • NII NACSIS-CAT ID (NCID)
    AN10012320
  • Text Lang
    JPN
  • ISSN
    0913-6339
  • NDL Article ID
    028034504
  • NDL Call No.
    Z16-1608
  • Data Source
    NDL  J-STAGE 
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