Ellipsometric Imager Using Correlation Image Sensor and Rotating Polarizers

• Shimizu Takaaki

  The University of Tokyo

• Kurihara Toru

  The University of Tokyo

• Ono Nobutaka

  The University of Tokyo

• Ando Shigeru

  The University of Tokyo

Journal

• SICE Annual Conference Program and Abstracts

  SICE Annual Conference Program and Abstracts 2003 (0), 56-56, 2003

  The Society of Instrument and Control Engineers

Details

• CRID: 1390001205585506048
• NII Article ID: 130005440812
• DOI: 10.11499/sicep.2003.0_56_3
• Text Lang: en
• Data Source:
  • JaLC
  • CiNii Articles