Bio-Microdevices Made of Thick Photoresist

• Suzuki Takaaki

  Gunma University JST, PRESTO

Bibliographic Information

Other Title

• 厚膜フォトレジストを構造体としたバイオマイクロデバイス
• アツマク フォトレジスト オ コウゾウタイ ト シタ バイオマイクロデバイス

Abstract

Recently, complex microstructures are required for microsystems with expanse of application fields. There is a limit in two-dimensional layer stacking method based on the conventional semiconductor manufacturing process because the processing process has been complicated with the processing microstructures. In this paper, a simple fabrication process using a three-dimensional UV lithography in combination with rotation and inclination of single mask is introduced. In addition, applications for bio-microsystems are shown in order to confirm the validity of the proposed fabrication process.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 137 (10), 314-317, 2017

  The Institute of Electrical Engineers of Japan

Keywords

• resist process
• photolithography
• microstructure
• thick photoresist
• assembly-free manufacturing

Details

• CRID: 1390001204460283008
• NII Article ID: 130006110325
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.137.314
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 028616356
• Web Site: http://id.ndl.go.jp/bib/028616356
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I028616356
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/137/10/137_314/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed