Structural analyses and reverse Monte Carlo modeling of niobium oxide amorphous film prepared by sputtering method

DOI Web Site 参考文献37件
  • SAJIKI Go
    Technological, educational supporting center in Takamatsu, National Institute of Technology, Kagawa College
  • BENINO Yasuhiko
    Graduate School of Environmental and Life Science, Okayama University
  • OKI Chinatsu
    Graduate School of Environmental and Life Science, Okayama University
  • OHARA Koji
    Japan Synchrotron Radiation Research Institute
  • OKANO Hiroshi
    General Education in Takamatsu, National Institute of Technology, Kagawa College
  • NANBA Tokuro
    Graduate School of Environmental and Life Science, Okayama University

抄録

Structural analyses of niobium oxide (NbOx) amorphous film prepared with a sputtering method have been performed by using synchrotron X-ray radiation at SPring-8. The composition was determined as Nb2O5·0.8H2O from the measurements of Rutherford back scattering, X-ray fluorescence, X-ray absorption near edge structure, and thermal desorption spectroscopy. Structural information was obtained by extended X-ray absorption fine structure and high energy X-ray diffraction measurements. It was supposed from the experimental data that NbOx consisted of distorted NbOn polyhedra connected by corner- and edge-sharing. Structural models were constructed with reverse Monte Carlo (RMC) simulations. In the RMC models, the structural characteristics were successfully reproduced, and H atoms were, however, randomly distributed. Then, bond valence sum (BVS) constraint was introduced to the RMC simulation. As the results, narrower distribution in BVS was achieved for all the constituent atoms, and distinct OH bonds were effectively generated in the RMC model.

収録刊行物

参考文献 (37)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ