Ultra-sensitive Trace-Water Optical Sensor with <i>In situ</i>- synthesized Metal–Organic Framework in Glass Paper

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Abstract

Monitoring of trace water in industrial gases is strongly recommended because contaminants cause serious problems during use, especially in the semiconductor industry. An ultra-sensitive trace-water sensor was developed with an <i>in situ</i>-synthesized metal–organic framework as the sensing material. The sample gas is passed through the sensing membrane and efficiently and rapidly collected by the sensing material in the newly designed gas collection/detection cell. The sensing membrane, glass paper impregnated with copper 1,3,5-benzenetricarboxylate (Cu-BTC), is also newly developed. The amount and density of the sensing material in the sensing membrane must be well balanced to achieve rapid and sensitive responses. In the present study, Cu-BTC was synthesized <i>in situ</i> in glass paper. The developed system gave high sensing performances with a limit of detection (signal/noise ratio = 3) of 9 parts per billion by volume (ppbv) H<sub>2</sub>O and a 90% response time of 86 s for 200 ppbv H<sub>2</sub>O. The reproducibility of the responses within and between lots had relative standard deviations for 500 ppbv H<sub>2</sub>O of 0.8% (<i>n</i> = 10) and 1.5% (<i>n</i> = 3), respectively. The long-term (2 weeks) stability was 7.3% for 400 ppbv H<sub>2</sub>O and one-year continuous monitoring test showed the sensitivity change of <∼3% before and after the study. Furthermore, the system response was in good agreement with the response achieved in cavity ring-down spectroscopy. These performances are sufficient for monitoring trace water in industrial gases. The integrated system with light and gas transparent structure for gas collection/absorbance detection can also be used for other target gases, using specific metal–organic frameworks.

Journal

  • Analytical Sciences

    Analytical Sciences 34(4), 495-500, 2018

    The Japan Society for Analytical Chemistry

Codes

  • NII Article ID (NAID)
    130006682640
  • NII NACSIS-CAT ID (NCID)
    AA10500785
  • Text Lang
    ENG
  • ISSN
    0910-6340
  • NDL Article ID
    028942686
  • NDL Call No.
    Z54-F482
  • Data Source
    NDL  J-STAGE 
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