Ultra-sensitive Trace-Water Optical Sensor with <i>In situ</i>- synthesized Metal–Organic Framework in Glass Paper

• OHIRA Shin-Ichi

  Department of Chemistry, Kumamoto University

• NAKAMURA Nao

  Department of Chemistry, Kumamoto University Tsukuba Laboratories, Taiyo Nippon Sanso Corporation

• ENDO Masaaki

  Tsukuba Laboratories, Taiyo Nippon Sanso Corporation

• MIKI Yusuke

  Tsukuba Laboratories, Taiyo Nippon Sanso Corporation

• HIROSE Yasuo

  Tsukuba Laboratories, Taiyo Nippon Sanso Corporation

• TODA Kei

  Department of Chemistry, Kumamoto University

Bibliographic Information

Other Title

• Ultra-sensitive Trace-Water Optical Sensor with In situ-synthesized Metal-Organic Framework in Glass Paper

Abstract

Monitoring of trace water in industrial gases is strongly recommended because contaminants cause serious problems during use, especially in the semiconductor industry. An ultra-sensitive trace-water sensor was developed with an in situ-synthesized metal–organic framework as the sensing material. The sample gas is passed through the sensing membrane and efficiently and rapidly collected by the sensing material in the newly designed gas collection/detection cell. The sensing membrane, glass paper impregnated with copper 1,3,5-benzenetricarboxylate (Cu-BTC), is also newly developed. The amount and density of the sensing material in the sensing membrane must be well balanced to achieve rapid and sensitive responses. In the present study, Cu-BTC was synthesized in situ in glass paper. The developed system gave high sensing performances with a limit of detection (signal/noise ratio = 3) of 9 parts per billion by volume (ppbv) H₂O and a 90% response time of 86 s for 200 ppbv H₂O. The reproducibility of the responses within and between lots had relative standard deviations for 500 ppbv H₂O of 0.8% (n = 10) and 1.5% (n = 3), respectively. The long-term (2 weeks) stability was 7.3% for 400 ppbv H₂O and one-year continuous monitoring test showed the sensitivity change of <∼3% before and after the study. Furthermore, the system response was in good agreement with the response achieved in cavity ring-down spectroscopy. These performances are sufficient for monitoring trace water in industrial gases. The integrated system with light and gas transparent structure for gas collection/absorbance detection can also be used for other target gases, using specific metal–organic frameworks.

Journal

• Analytical Sciences

  Analytical Sciences 34 (4), 495-500, 2018

  The Japan Society for Analytical Chemistry

Keywords

• Water
• Cu-BTC
• optical gas sensor
• industrial gases

Details

• CRID: 1390001204260641536
• NII Article ID: 130006682640
• NII Book ID: AA10500785
• DOI: 10.2116/analsci.17p453
• ISSN: 13482246
• ISSN: 09106340
• NDL BIB ID: 028942686
• PubMed: 29643314
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I028942686
• Web Site: https://link.springer.com/content/pdf/10.2116/analsci.17P453.pdf
• Web Site: https://link.springer.com/article/10.2116/analsci.17P453/fulltext.html
• Web Site: https://www.jstage.jst.go.jp/article/analsci/34/4/34_17P453/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • PubMed
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed