Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation

• MIYAZAWA Tetsuya

  SOKENDAI

• TOBISHIMA Kensuke

  Hirosaki University

• KATO Hiroo

  Hirosaki University

• KURIHARA Masashi

  Yokohama National University

• OHNO Shinya

  Yokohama National University

• KIKUCHI Takashi

  KEK

• MASE Kazuhiko

  SOKENDAI KEK

抄録

We have developed a new non-evaporable getter (NEG) coating using titanium and palladium vacuum sublimation. The inner wall of the test chamber was coated with a 1-µm Ti thin film using the Ti sublimation pumps under a vacuum of 6.5×10⁻⁶ Pa (Ti-coated chamber). This chamber was then coated with a 10-nm Pd thin film using the Pd sublimation filament under a vacuum of 2.4×10⁻⁴ Pa (Pd/Ti-coated chamber). The uncoated, Ti-coated, and Pd/Ti-coated chambers were baked for 6 h at a maximum temperature of 185℃. Five hours after closing the valve, the pressures in the Pd/Ti-coated chamber were about 1.4×10⁻⁶ Pa even after six heating–venting cycles. The relatively low activation temperature was attributed to the low concentration of oxygen in the Pd/Ti thin films. The Pd/Ti coating can be used for vacuum systems that are frequently vented.

収録刊行物

• 表面と真空

  表面と真空 61 (4), 227-235, 2018

  公益社団法人 日本表面真空学会

キーワード

• non-evaporable getter
• vacuum
• titanium
• palladium
• thin film

詳細情報

• CRID: 1390282681102821632
• NII論文ID: 130006688239
• NII書誌ID: AA12808657
• DOI: 10.1380/vss.61.227
• ISSN: 24335843
• ISSN: 24335835
• NDL書誌ID: 028996236
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I028996236
• Web Site: https://www.jstage.jst.go.jp/article/vss/61/4/61_20180075/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可