Surface-normal electro-optic-polymer modulator with silicon subwavelength grating

DOI Web Site 2 Citations 13 References
  • Kosugi Yuji
    Department of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo
  • Yamada Toshiki
    National Institute of Information and Communications Technology
  • Otomo Akira
    National Institute of Information and Communications Technology
  • Nakano Yoshiaki
    Department of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo
  • Tanemura Takuo
    Department of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo

Abstract

<p>We propose novel silicon-based surface-normal optical modulator using electro-optic (EO) polymer. The EO polymer is embedded inside a thin silicon subwavelength grating layer, which is used as both the interdigitated electrodes for effective poling of the EO polymer, and as high-Q resonant structure for the incident light to enable efficient modulation. We numerically demonstrate 10-dB intensity modulation at 1550-nm wavelength under a refractive index change of only 3.8 × 10−4, corresponding to the driving voltage below 1 V. Total-reflectance phase modulator is also demonstrated by adding a backside reflector. With inherently high-speed response over several tens of GHz, scalability to dense 2-D array integrated with CMOS driver circuitry, and relatively easy and low-cost fabrication without epitaxial process, the proposed device may find versatile applications in optical interconnects, free-space optical communications, imaging and sensing.</p>

Journal

  • IEICE Electronics Express

    IEICE Electronics Express 13 (17), 20160595-20160595, 2016

    The Institute of Electronics, Information and Communication Engineers

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