低加速電子線SEM/STEMを用いた局在場可視化技術

• 藤田 淳一

  筑波大学数理物質系電子物理工学専攻

書誌事項

タイトル別名

• Visualization of Localized Field Using Deflection of Low-Energy Electron Beam with SEM/STEM
• テイカソク デンシセン SEM/STEM オ モチイタ キョクザイジョウ カシカ ギジュツ

抄録

　High-sensitive visualization of the local electric and magnetic field is possible using a low energy electron beam combining with a simple grid detector configuration. The beam deflection goes along with the clear principle that the larger deflection can be induced by lower energy electron based on the Rutherford scattering scheme. The field distribution around two-dimensional materials allows quantitative analysis of the local field, showing good agreements with FEM simulation. Well defined beam scanning control established in the recent scanning electron microscope (SEM) can project the detector grid image superimposed on the specimen image. And thus the localized field distribution was easily visualized through a simple E-filed vector translation based on the deflection configuration. Detailed techniques and the analysis were described from the viewpoint of practical applications.<br>

収録刊行物

• Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ

  Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ 60 (10), 397-405, 2017

  一般社団法人 日本真空学会

キーワード

• Spectroscopy
• Surfaces and Interfaces
• Instrumentation
• General Materials Science

詳細情報

• CRID: 1390282680272418048
• NII論文ID: 130006900187
• NII論文ID: 120007134186
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj2.60.397
• ISSN: 18824749
• ISSN: 18822398
• HANDLE: 2241/00151877
• NDL書誌ID: 028602913
• Web Site: https://tsukuba.repo.nii.ac.jp/records/46573
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I028602913
• Web Site: https://www.jstage.jst.go.jp/article/jvsj2/60/10/60_17-RV-022/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可