Recent Progress of SIMS Technique : from Novel Primary Beams to Advanced Mass Spectrometers

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  • MATSUO Jiro
    Kyoto University, Quantum Science and Engineering Center SENTAN, Japan Science and Technology Agency (JST)
  • SEKI Toshio
    SENTAN, Japan Science and Technology Agency (JST) Kyoto University, Department of Nuclear Engineering
  • AOKI Takaaki
    SENTAN, Japan Science and Technology Agency (JST) Kyoto University, The Academic Center for Computing and Media Studies

Bibliographic Information

Other Title
  • SIMS技術の飛躍的発展を支える新技術：新奇なイオンビーム開発から先端質量分析法まで
  • SIMS ギジュツ ノ ヒヤクテキ ハッテン オ ササエル シン ギジュツ : シンキ ナ イオンビーム カイハツ カラ センタン シツリョウ ブンセキホウ マデ

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Abstract

<p>Recent progress of SIMS technique is reported in conjunction with novel primary ion beams and advanced mass spectrometers. Numerous applications of SIMS have been proposed and demonstrated in last decade, covering from organic semiconductors to cells and tissues. One of the biggest problems was “Static-Limit” for analysis of organic molecules, which is very fragile for ion bombardment. After innovation of massive cluster ion beams, the issue of “Static-Limit” has been overcame. This opens a new possibility for SIMS to analyze organic materials. Ultra-high mass resolution mass spectrometer, MS/MS technique, cationization enhancement and future prospects of SIMS are discussed.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 61 (7), 426-434, 2018-07-10

    The Japan Society of Vacuum and Surface Science

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