Emission Trajectory Calculation of Ions from the Shave-off Cross Section for Realization of 3D Shave-off Method

DOI Web Site 被引用文献1件 参考文献13件
  • Takagi Yuto
    School of Engineering, The University of Tokyo Institute of Industrial Science, The University of Tokyo
  • Kang So-Hee
    Institute of Industrial Science, The University of Tokyo
  • Matsumura Kohei
    Institute of Industrial Science, The University of Tokyo
  • Azuma Takeki
    Institute of Industrial Science, The University of Tokyo
  • Tomiyasu Bunbunoshin
    Institute of Industrial Science, The University of Tokyo Environmental Science Center, The University of Tokyo
  • Owari Masanori
    Institute of Industrial Science, The University of Tokyo Environmental Science Center, The University of Tokyo

抄録

<p>Secondary ion mass spectrometry can analyze all elements and has high versatility. In our laboratory, we have established a method of sputtering the whole sample from the side by using partial primary beam called Shave-off method, which increases spatial resolution and eliminates an effect originated by surface roughness. Furthermore, designing the ion optics that can enlarge and converge the emitted secondary ions from the cross section of the micro sample on the detector, high-precision three-dimensional distribution data with surface resolution of several nanometer level and depth direction resolution of several tens of nanometer level can be obtained at high speed. However, the secondary ions trajectory and the ion aberration caused by the lens in the Shave-off condition have not been verified. In this study, we have constructed a simulation of calculating the trajectory of emitted ions from the Shave-off cross section. It is expected that the simulation will be of great help and powerful tool for future development. [DOI: 10.1380/ejssnt.2018.324]</p>

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