書誌事項
- タイトル別名
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- Preparation and Characteristic Evaluation of Silica-agglomerate Electret with Ultra-thin PTFE Layer for Ultrasonic Sensor
- チョウオンパ センサ ニ テキシタ ゴクウス PTFEソウ オ ユウスル シリカ ギョウシュウタイ エレクトレット ノ セイサク ト トクセイ ヒョウカ
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<p>Influence of formation of silica agglomerates on a ultra-thin fluororesin electret on the characteristics of the charge-retention and the aero-ultrasonic sensor was investigated. The ultra-thin PTFE layer (thickness was 2.8 µm) was obtained by spin-coating and silica agglomerates were formed by spraying droplets of colloidal silica. The formation of PTFE/silica agglomerate composite layer on PTFE layer resulted the larger and more flat agglomerates than the formation of single layer of silica agglomerates on the PTFE layer. The measurement of the charge retention of the obtained electrets after 24 h at RT and at 250℃ revealed that the formation of PTFE/silica-agglomerate composite layer on the ultra-thin PTFE layer enhanced the charge retention. Furthermore, the electret condenser sensor (ECS) fabricated using the silica-agglomerate electret on the ultra-thin PTFE layer exhibited the excellent sensitivity and high resonance frequency compared with conventional ECS with PFA layer (thickness was 12.5 µm).</p>
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 138 (9), 441-447, 2018-09-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390845712995195264
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- NII論文ID
- 130007479704
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 029278896
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可