レーザーアトムプローブによるナノ組織解析

• 大久保 忠勝

  物質・材料研究機構 磁性・スピントロニクス材料研究拠点

書誌事項

タイトル別名

• Nanostructure Analysis by Laser Assisted Atom Probe Tomography
• レーザーアトムプローブ ニ ヨル ナノ ソシキ カイセキ

抄録

Microstructures of materials and devices greatly influence the mechanical, electrical, magnetic, and other properties. In order to improve such properties, it is very important to understand the relationship between the microstructure and the properties. Atom probe tomography is a technique which can identify the position of individual atoms and can display the results as 3D tomography. Also, the atomic species are identified based on the time-of-flight measurement. Therefore, all the elements from hydrogen can be analyzed. Although there are several theoretical limitations of this method, the application area is spreading by complementing with other methods such as SEM, TEM and so on. In this paper, the principle and the limitations of the laser assisted atom probe tomography, efforts to improve performance, influence of measuring conditions such as laser wavelength and intensity, and examples of typical application are shown.

収録刊行物

• 表面と真空

  表面と真空 61 (12), 778-783, 2018-12-10

  公益社団法人 日本表面真空学会

キーワード

• atom probe
• nanocharacterization
• laser
• field evaporation

詳細情報

• CRID: 1390564238052420480
• NII論文ID: 130007528730
• NII書誌ID: AA12808657
• DOI: 10.1380/vss.61.778
• ISSN: 24335843
• ISSN: 24335835
• NDL書誌ID: 029402705
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I029402705
• Web Site: https://www.jstage.jst.go.jp/article/vss/61/12/61_20180243/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可