The effect of the starting Si powder on the sinterability and thermo-mechanical properties of sintered reaction-bonded silicon nitride
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- GO Shin-Il
- Materials Science and Engineering, Pusan National University Engineering Ceramics Research Group, Korea Institute of Materials Science
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- KO Jae-Woong
- Engineering Ceramics Research Group, Korea Institute of Materials Science
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- KIM Ha-Neul
- Engineering Ceramics Research Group, Korea Institute of Materials Science
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- KWON Se-Hun
- Materials Science and Engineering, Pusan National University
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- KIM Hai-Doo
- Engineering Ceramics Research Group, Korea Institute of Materials Science
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- PARK Young-Jo
- Engineering Ceramics Research Group, Korea Institute of Materials Science
抄録
<p>The effects of the size of Si powder on the thermal conductivity and strength of sintered reaction-bonded silicon nitride (SRBSN) were investigated. Si powders with various sizes were prepared by controlling the high-energy milling duration of the starting Si powder, where the median Si size varied from 3.97 to 0.62 µm, corresponding to an oxygen content of 0.54 to 2.57 wt %. The thermal conductivity increased gradually up to the 4 h milling (D50 = 1.10 µm or 1.60 wt % oxygen) owing to a gain in the relative density, but decreased by 25% for the 12 h milling (D50 = 0.62 µm or 2.57 wt % oxygen). On the other hand, the flexural strength showed almost no change until the 4 h milling, but increased by 20% for 12 h milling. This opposite tendency was elucidated by the difference in grain size distribution and thickness of intergranular grain boundary phase (IGP); Clear bimodal size distribution of grains contributed to high strength, and the nearly doubled thickness of IGP was observed for SRBSN from the finest Si powder (D50 = 0.62 µm or 2.57 wt % oxygen). In order to meet the required thermal properties for the substrate usages by sintering at 1900°C, the size of silicon powder of D50 = 1.10 µm (1.60 wt % oxygen) is allowed for 6 h sintering, but that of D50 = 0.62 µm (2.57 wt % oxygen) needs prolonged sintering time over 6 h (12 h in the current experiment) to reach required grain growth.</p>
収録刊行物
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 127 (3), 136-142, 2019-03-01
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390282763101929344
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- NII論文ID
- 130007606919
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- ISSN
- 13486535
- 18820743
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可