オスミウム蒸着膜を用いた軽元素のEDS定量  [in Japanese] EDS quantification of light elements using osmium surface coating  [in Japanese]

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Abstract

岩石や鉱物などの非電導体試料のSEM観察およびEDS組成分析をするにあたり,試料表面に電導性の蒸着膜を施す必要がある.本研究では,膜厚5nmの極めて薄いオスミウムの蒸着膜を用い,主要な造岩鉱物試料の元素定量分析を行い,その有用性について検討した.分析の結果,一般的に用いられる炭素蒸着膜と同等の精度の良い定量値が得られることを確認し,特に,酸素や炭素,窒素といった軽元素の定量分析に極めて有効であることを見出した.

 For SEM observation and EDS analysis of non-conductive (insulating) materials such as most minerals and rocks, surface coating of a thin conductive layer is a prerequisite. In the present study, we tested an extremely thin osmium coating (5 nm thick) for microprobe quantification using SEM-EDS. The result showed that it is not only applicable for normal quantification of major oxide and silicate minerals but also effective for accurate quantification of light elements such as carbon, nitrogen and oxygen.

Journal

  • Abstracts for Annual Meeting of Japan Association of Mineralogical Sciences

    Abstracts for Annual Meeting of Japan Association of Mineralogical Sciences 2014(0), 31, 2014

    Japan Association of Mineralogical Sciences

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