酸化物単結晶基板上のスパッタ触媒金属膜を用いたグラフェン合成

• 中村 嘉孝

  八戸工業高等専門学校

• 松元 ほの香

  八戸工業高等専門学校 電気情報工学科 学生

書誌事項

タイトル別名

• Graphene synthesis using sputtered catalyst metal films on the oxide single crystal substrates

抄録

In order to apply graphene to biosensor and gas sensor, it was fabricated on oxide single crystal substrate with Cu catalytic metal. A Cu thin film was deposited on a c-sapphire and (100) MgO single crystal substrate by a sputtering method. When Cu was sputter deposited on a sapphire substrate at a substrate temperature of 600 ° C., a (111) oriented Cu thin film grew. When Cu was sputtered on a MgO substrate at a substrate temperature of 600 ° C., a (100) oriented Cu thin film grew. Next, graphene was grown on the substrate with Cu thin film by thermal CVD method. It was confirmed that single-layer graphene was growing by Raman spectroscopy.

収録刊行物

• 八戸工業高等専門学校紀要

  八戸工業高等専門学校紀要 53 (0), 53-55, 2019

  国立高等専門学校機構 八戸工業高等専門学校

キーワード

• Single layer graphene
• c-sapphaire and MgO substrate
• Cu catalyst

詳細情報

• CRID: 1390001288132248320
• NII論文ID: 130007633964
• DOI: 10.24704/hnctech.53.0_53
• ISSN: 24332003
• ISSN: 03854124
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可