Deposition of orientation-controlled thick (K,Na)NbO₃ films on metal substrates by repeated hydrothermal deposition technique

• ITO Yoshiharu

  Department of Materials Science and Engineering, Tokyo Institute of Technology

• TATEYAMA Akinori

  Department of Materials Science and Engineering, Tokyo Institute of Technology

• NAKAMURA Yoshiko

  Department of Materials Science and Engineering, Tokyo Institute of Technology

• SHIMIZU Takao

  Department of Materials Science and Engineering, Tokyo Institute of Technology

• KUROSAWA Minoru

  Department of Electrical and Electronic Engineering, Tokyo Institute of Technology

• UCHIDA Hiroshi

  Department of Materials and Life Sciences, Sophia University

• SHIRAISHI Takahisa

  Department of Institute for Materials Research, Tohoku University

• KIGUCHI Takanori

  Department of Institute for Materials Research, Tohoku University

• KONNO Toyohiko J.

  Department of Institute for Materials Research, Tohoku University

• ISHIKAWA Mutsuo

  Department of Clinical Engineering, Toin University of Yokohama

• FUNAKUBO Hiroshi

  Department of Materials Science and Engineering, Tokyo Institute of Technology

抄録

(K,Na)NbO₃ thick films were grown at 240°C on Ni-based metal substrates by repeated hydrothermal method. The metal substrates were covered with two types of buffer layers; SrRuO₃/LaNiO₃ and SrRuO₃. Film thickness monotonically increased with increasing number of deposition cycles. The 27 µm-thick film was obtained on the metal substrate with SrRuO₃/LaNiO₃ by four cycles. The obtained films tended to show {100}_c orientation and their degree of orientation increased with increasing number of deposition cycles. Films deposited on SrRuO₃/LaNiO₃-covered metal substrates showed more highly {100}_c orientation compared with those on SrRuO₃-covered metal substrates. Remnant polarization and coercive field measured at 5 kHz were 12 µC/cm² and 70 kV/cm, while their effective values of piezoelectric coefficient (d₃₃) was 35–40 pm/V for both films. These properties remained unchanged irrespective of a number of deposition cycles despite the orientation change of films. These results show that repeated hydrothermal deposition technique is one of the effective ways to prepare thick (K,Na)NbO₃ films on metal substrates.

収録刊行物

• Journal of the Ceramic Society of Japan

  Journal of the Ceramic Society of Japan 127 (7), 478-484, 2019-07-01

  公益社団法人 日本セラミックス協会

キーワード

• Hydrothermal synthesize
• Lead-free (K,Na)NbO₃ film
• Orientation control
• Metal substrate
• Ferroelectric and piezoelectric properties

詳細情報

• CRID: 1390282763127915136
• NII論文ID: 130007672977
• DOI: 10.2109/jcersj2.19008
• ISSN: 13486535
• ISSN: 18820743
• Web Site: https://www.jstage.jst.go.jp/article/jcersj2/127/7/127_19008/_pdf
• 本文言語コード: en
• データソース種別:
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