Development of a Non-Rigid Micro-Scale Cutting Mechanism Measuring the Cutting Force Using an Optical Lever

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Abstract

<p>A new cutting mechanism for the fabrication of micro-scale grooves is presented in this study. Based on the control principle of the nano-cutting mechanism using an Atomic Force Microscope (AFM), in the newly developed system, a single crystal diamond tool is mounted at the free edge of a cantilever beam and is used for the removal of material. During the cutting process, the cantilever undergoes a deformation that is required for the implementation of a machining force feedback control. It was experimentally observed that the use of this mechanism enables to maintain the cutting depth of the micro-grooves constant even if they are fabricated on inclined surfaces; this is achieved by maintaining the normal cutting force constant using a feedback controller. For this experimental system, an optical lever is used to measure the angular deformation at the tip of the cantilever, thus providing a better understanding of total cutting force involved in the machining process.</p>

Journal

  • International Journal of Automation Technology

    International Journal of Automation Technology 8(6), 903-911, 2014

    Fuji Technology Press Ltd.

Codes

  • NII Article ID (NAID)
    130007673785
  • Text Lang
    ENG
  • ISSN
    1881-7629
  • NDL Article ID
    025970503
  • NDL Call No.
    Z78-A598
  • Data Source
    NDL  J-STAGE 
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