Development of a Non-Rigid Micro-Scale Cutting Mechanism Measuring the Cutting Force Using an Optical Lever
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- Herrera-Granados German
- Graduate School of Engineering, Chiba University
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- Ashida Kiwamu
- AMRI, National Institute of Advanced Industrial Science and Technology (AIST)
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- Ogura Ichiro
- AMRI, National Institute of Advanced Industrial Science and Technology (AIST)
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- Okazaki Yuichi
- AMRI, National Institute of Advanced Industrial Science and Technology (AIST)
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- Morita Noboru
- Graduate School of Engineering, Chiba University
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- Hidai Hirofumi
- Graduate School of Engineering, Chiba University
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- Matsusaka Souta
- Graduate School of Engineering, Chiba University
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- Chiba Akira
- Graduate School of Engineering, Chiba University
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Abstract
<p>A new cutting mechanism for the fabrication of micro-scale grooves is presented in this study. Based on the control principle of the nano-cutting mechanism using an Atomic Force Microscope (AFM), in the newly developed system, a single crystal diamond tool is mounted at the free edge of a cantilever beam and is used for the removal of material. During the cutting process, the cantilever undergoes a deformation that is required for the implementation of a machining force feedback control. It was experimentally observed that the use of this mechanism enables to maintain the cutting depth of the micro-grooves constant even if they are fabricated on inclined surfaces; this is achieved by maintaining the normal cutting force constant using a feedback controller. For this experimental system, an optical lever is used to measure the angular deformation at the tip of the cantilever, thus providing a better understanding of total cutting force involved in the machining process.</p>
Journal
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- International Journal of Automation Technology
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International Journal of Automation Technology 8 (6), 903-911, 2014-11-05
Fuji Technology Press Ltd.