強磁性トンネル接合素子を用いた生体磁気センサの開発  [in Japanese] Development of bio-magnetic sensors with a ferromagnetic tunnel junction  [in Japanese]

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Author(s)

    • 安藤 康夫 ANDO Yasuo
    • 東北大学 大学院工学研究科応用物理学専攻 Department of Applied Physics, Graduate School of Engineering, Tohoku University

Abstract

<p>強磁性トンネル接合を用いた,室温動作の生体磁場測定センサを開発した.トンネル接合素子を直並列に微細加工してのノイズ低減を図り,<i>S</i>/<i>N</i>向上のためのブリッジ,アンプ,フィルタなどの各種回路を組み込んだ,磁気センサモジュールを作製した.これを用いて心磁場の測定に成功した.また,センサプローブ2対を用いて環境ノイズをキャンセルすることにより,磁気シールドの外であっても信号を検出可能であることを示した.本稿は,このセンサの詳細な特性,生体磁場検出に向けての必要な技術課題,ならびに将来の展開の可能性について述べる.</p>

<p>We have developed a biomagnetic field measurement sensor at room temperature using a ferromagnetic tunnel junction. A magnetic tunnel junction (MTJ) was microfabricated in series and parallel in order to reduce device noise and a magnetic field sensor module incorporating various circuits such as a bridge, an amplifier, a filter, etc., for improving the S/N ratio was fabricated. Using this module, a cardiac magnetic field was successfully measured. In addition, by canceling the environmental noise using two sensor probes, it was shown that a signal can be detected even outside the magnetic shield. In this paper, we describe the detailed characteristics of this sensor, the necessary technical problems for biomagnetic field detection, and the possibilities for future development.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 86(4), 305-309, 2017

    The Japan Society of Applied Physics

Codes

  • NII Article ID (NAID)
    130007715439
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • ISSN
    0369-8009
  • NDL Article ID
    028138046
  • NDL Call No.
    Z15-243
  • Data Source
    NDL  J-STAGE 
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