Progress of ultrahigh-<i>Q</i> optical nanocavities using a silicon photonic crystal

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  • TAKAHASHI Yasushi
    Department of Electronics Science and Engineering, Osaka Prefecture University
  • OKANO Makoto
    National Institute of Advanced Industrial Science and Technology
  • ASANO Takashi
    Department of Electronic Science and Engineering, Kyoto University
  • NODA Susumu
    Department of Electronic Science and Engineering, Kyoto University

Bibliographic Information

Other Title
  • 超高<i>Q</i>値シリコンフォトニック結晶光ナノ共振器の進展
  • 超高Q値シリコンフォトニック結晶光ナノ共振器の進展
  • チョウコウQチ シリコンフォトニック ケッショウ ヒカリ ナノ キョウシンキ ノ シンテン

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Abstract

<p>Photonic crystal nanocavities with high quality factors (Q) have attracted quite a bit of attention from many researchers. Particularly, silicon high-Q nanocavities have increased the record for the highest Q for a photonic crystal cavity over these last 15 years. Currently, silicon nanocavities are studied in various areas for industrial applications. The current record for a Q exceeds 10 million and furthermore, an average value of 2 million has been recently achieved even in the nanocavities fabricated on a large diameter substrate using photolithography. Therefore, silicon nanocavities will be used in a wider range of fields. Here we describe the recent studies for these ultrahigh-Q silicon nanocavities.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 87 (10), 749-753, 2018-10-10

    The Japan Society of Applied Physics

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