Effects of gas pressure on the size distribution and structure of carbon nanoparticles using Ar + CH4 multi-hollow discharged plasma chemical vapor deposition

• HWANG Sung Hwa

  Department of Electronics, Kyushu University

• KAMATAKI Kunihiro

  Department of Electronics, Kyushu University

• ITAGAKI Naho

  Department of Electronics, Kyushu University

• KOGA Kazunori

  Department of Electronics, Kyushu University

• SHIRATANI Masaharu

  Department of Electronics, Kyushu University

書誌事項

タイトル別名

• Effects of Gas Pressure on the Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH₄Multi-Hollow Discharged Plasma Chemical Vapor Deposition

抄録

Using an Ar + CH₄ multi-hollow discharge plasma chemical vapor deposition (MHDPCVD) method, carbon nanoparticles (CNPs) are synthesized in a size range between 10 nm and 100 nm at gas pressures from 2 Torr to 5 Torr. The size of the nanoparticles increases from 45.42 nm³ at 2 Torr to 67.85 nm³ at 5 Torr. The size dispersion also increases. Conversely, the optical emission intensities and generation of carbon related radicals decrease with increasing pressure. The Raman measurements indicate that these CNPs are composed of polymer structures containing relatively high clustered and distorted sp2 sites.

収録刊行物

• Plasma and Fusion Research

  Plasma and Fusion Research 14 (0), 4406115-4406115, 2019-09-09

  一般社団法人 プラズマ・核融合学会

キーワード

• carbon nanoparticle
• multi-hollow discharge plasma chemical vapor deposition
• optical emission spectroscopy
• Raman spectroscopy

詳細情報

• CRID: 1390564227318803712
• NII論文ID: 130007723652
• DOI: 10.1585/pfr.14.4406115
• ISSN: 18806821
• Web Site: https://www.jstage.jst.go.jp/article/pfr/14/0/14_4406115/_pdf
• 本文言語コード: en
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