Preparation of LiMn<sub>2</sub>O<sub>4</sub> films by sputtering method

Abstract

Manganese oxides have been studied as a cathode material in the Li secondary batteries. Preparation of LiMn2O4 thin films were tried with a sputtering method. This material is superior to other materials in the cost performance as well as non-toxicity. The crystal properties were improved after an annealing process. The preparation procedure is introduced through this study.

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