Measurement of Complex Permittivity of a Dielectric Thin Film by the Cylindrical Cavity Resonator Having Sliding End Plates

• Kogami Yoshinori

  Utsunomiya University

• Igarashi Kazufumi

  Utsunomiya University

• Shimizu Takashi

  Utsunomiya University

Bibliographic Information

Other Title

• 可変短絡板付き円筒空洞共振器法による薄形フィルムのミリ波複素誘電率測定
• カヘン タンラク イタツキ エントウ クウドウ キョウシンキホウ ニ ヨル ウスガタ フィルム ノ ミリハフクソ ユウデンリツ ソクテイ

Abstract

This technical report shows a measurement technique for the complex permittivity of a dielectric thin film with the cylindrical resonator having sliding end plates in the millimeter wave region. In order to eliminate the influence of unwanted TM₁₁₁ resonance mode which is frequently appeared on the response of TE₀₁₁ for measurement of the dielectric thin film, the position of the end plates is adjusted adequately. The methodology and experimental results are presented to show the usefulness of this technique.

Journal

• IEEJ Transactions on Electronics, Information and Systems

  IEEJ Transactions on Electronics, Information and Systems 140 (4), 492-495, 2020-04-01

  The Institute of Electrical Engineers of Japan

Keywords

• dielectric thin films
• millimeter wave
• complex permittivity measurements
• cylindrical cavity resonator method

Details

• CRID: 1390565134843838976
• NII Article ID: 130007825209
• NII Book ID: AN10065950
• DOI: 10.1541/ieejeiss.140.492
• ISSN: 13488155
• ISSN: 03854221
• NDL BIB ID: 030376231
• Web Site: http://id.ndl.go.jp/bib/030376231
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I030376231
• Web Site: https://www.jstage.jst.go.jp/article/ieejeiss/140/4/140_492/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed